Energy- and charge-state-resolved spectrometry of tin laser-produced plasma using a retarding field energy analyzer
نویسندگان
چکیده
Abstract We present a method to obtain the individual charge-state-dependent kinetic-energy distributions of tin ions emanating from laser-produced plasma their joint overlapping energy measured by means retarding field analyzer (RFA). The extracting charge state specific parameters ion signals is described mathematically, and reinforced with experimental results. absolute charge-state-resolved obtained ns-pulse Nd:YAG-laser-produced microdroplet plasmas in setting relevant for state-of-the-art extreme ultraviolet nanolithography.
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ژورنال
عنوان ژورنال: Applied Physics B
سال: 2022
ISSN: ['1432-0649', '0946-2171']
DOI: https://doi.org/10.1007/s00340-022-07844-5